Application of thin films of SnO2 and SnO2:Ru as propane sensors

Authors

  • J. Aguilar Leyva SEES, Departamento de Ingeniería Eléctrica, CINVESTAV-IPN
  • A. Maldonado SEES, Departamento de Ingeniería Eléctrica, CINVESTAV-IPN
  • M. de la L. Olvera SEES, Departamento de Ingeniería Eléctrica, CINVESTAV-IPN

Keywords:

Thin films, Semiconductor Oxides, Tin Oxide, Propane Gas Sensors.

Abstract

In this work we report the sensing properties of undoped and ruthenium-doped tin oxide thin films (SnO2, SnO2:Ru) with different thicknesses, in a controlled atmosphere of propane gas  (C3H8) at different operation temperatures. The films were deposited onto soda-lime glass substrates by the spray pyrolysis technique at different deposition temperatures, namely, 300, 350, 400, and 450°C. All the films were annealed in vacuum at 400°C during 1 h in order to stabilize the surface physical characteristics. The sensing properties of the films were characterized by the surface electrical resistance ratio in a C3H8 atmosphere, and air as reference. Maximum sensitivities, on the order of 1.4 and 7.4 were obtained for undoped SnO2, and, SnO2:Ru thin films, respectively.

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Published

2012-06-15

Issue

Section

Research Papers

How to Cite

Application of thin films of SnO2 and SnO2:Ru as propane sensors. (2012). Superficies Y Vacío, 25(2), 117-121. https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/215