Author Details

Alemán-Arce, Miguel Ángel, Centro de Nanociencias y Micro y Nanotecnologías-Instituto Politécnico Nacional, Mexico

• Superficies y Vacío Vol. 31 No. 3 (2018) Research Papers
  Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology
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