Characterization of nanostructured SnO2 films deposited by reactive DC-magnetron sputtering
Keywords:
DC-magnetron sputtering, Tin Oxide, Raman spectroscopyAbstract
Nanostructured tin oxide thin films were deposited on silicon and glass slides substrates by reactive DC-Magnetron sputtering using a tin target in a mixture of argon and oxygen gases. The substrate temperature was varied in the range from 53 to 243 oC, keeping the other deposition parameters constant. The tin oxide films were characterized by: Scanning Electron Microscopy, Energy Dispersive Spectrometry, X Ray Diffraction, microRaman spectroscopy and UV-VIS spectroscopy. It was found that the substrate temperature has an effect mainly on the structural, morphological and optical properties of the thin films. At 53 and 90 oC the tetragonal crystalline phase was obtained while a mixture of crystalline phases (o-SnO2 and t-SnO2) was obtained at 148, 185 and 243 °C.References
Matthias Batzill, Ulrike Diebold, Progress in Surface Science 79, 47 (2005).
Min-Sik Park, Guo-Xiu Wang, Yong-Mook Kang, David Wexler, Shi-Xue Dou, Hua-Kun Liu, Angew. Chem. Int. Ed., 46, 750 (2007).
D. Solís-Casados, E. Vigueras-Santiago, S. Hernández- López, M. A. Camacho-López, Ind. Eng. Chem. Res., 48, 1249 (2009).
F. Hernandez-Ramirez, J. D. Prades, A. Tarancon, S. Barth, O. Casals, R Jiménez–Diaz, E. Pellicer, J. Rodriguez, M. A. Juli, A. Romano-Rodriguez, J. R. Morante, S. Mathur, A. Helwig, J. Spannhake and G. Mueller, Nanotechnology 18, 495501 (2007).
X. Huang, J. Liu, Z. Pi, Z. Yu, Sensors 3, 361 (2003).
K. Suito, N. Kawai, Y. Masuda, Mat. Res. Bull. 10, 677 (1975).
F. J. Lamelas, S. A. Reid, Phys. Rev. B 60, 9347 (1999).
Z. W. Chen, C. M. L. Wu, C. H. Shek, J. K. L.Lai, Z. Jiao, M. H. Wu, Critical Reviews in Solid State and Materials Sciencies 33, 197(2008).
L. Sangaletti, L. E. Depero, A. Dieguez, G. Marca, J.R. Morante, A. Romano-Rodriguez, G. Sberveglieri, Sensors and Actuators B 44, 268 (1997).
L. Kong, J. Ma, Z. Zhu, C.Luan, X. Yu, Q. Yu, Materials Letters 64, 1350 (2010).
L. M. Cukrov, P. G. McCormick, K. Galatsis, W. Wlodarski, Sensors and Actuators B 77, 491 (2001).
M. K. Kennedy, F. E. Kruis, H. Fissan, H. Nienhaus, A. Lorke, T.H. Metzger, Sensors and Actuators B 108, 62 (2005).
Jordi Arbiol, Elisabetta Comini, Guido Faglia, Giorgio Sberveglieri, Joan Ramon Morante, Journal of Crystal Growth 310, 253 (2008).
Marcelo Ornaghi Orlandi, Antonio José Ramirez, Edson Roberto Leite, and Elson Longo, Crystal Growth & Design 8, 1067 (2008).
S. Hamzaoui, M. Adnane, Applied Energy 65, 19 (2000).
M. Ruske, G. Bauer, J. Pistner, U. Pfafflin, J. Szczyrbowski, Thin Solid Films 351, 146 (1999).
A. Martel. F. Caballero-Briones, R. Castro-Rodriguez, P. Bartolo-Pérez. Superficies y Vacío 17, 1 (2004).
I. R. Beattie and T.R. Gilson, J. Chem. Soc. A., Phys. Theor. 2322 (1969).
J. Zuo, C. Xu, X. Liu, C. Wang, C. Wang, Y. Hu, Y. Qian, J. Appl. Phys. 75, 1835(1994).
A. Diéguez, A. Romano-Rodríguez, J. R. Morante, U.Weimar, M. Schweizer-Berberich, W. Gopel, Sensors and actuators B 31, 1 (1996).
L. Albello, B. Bochu, A. Gaskov, S. Koudryavtseva, G. Lucazeau, M. Roumyantseva J. of Solid State Chemistry 135, 78 (1998).
A. Diéguez, A. Romano-Rodríguez, A. Vilà, J. R. Morante, J. Applied Physics 90, 95 (2001).
S. H. Sun, G. W. Meng, G. X. Zhang, T. Gao, B. Y. Geng, L. D. Zhang, J. Zuo, Chemical Physics Letters 376, 103 (2003).
A. M. Goodman, Applied Optics 17, 2779 (1978).
J. Tauc, Optical Properties of Solids, North-Holland, Amterdam, 1972.
Downloads
Published
Issue
Section
License
©2025 by the authors; licensee SMCTSM, Mexico. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).
