Synthesis of base Pb-Ti thin films deposited by AA-CVD method, crystalographic and microstructural characterization
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Keywords

Thin film
PbTiO3
CVD-AA
Ferroelectric
Perovskite. Películas delgadas
PbTiO3
CVD-AA
Ferroeléctrico
Perovskita.

How to Cite

Ramos Cano, J., González Zamarripa, G., Soria Aguilar, M. de J., Amézaga Madrid, P., Hurtado Macías, A., González Hernández, J., & Miki Yoshida, M. (2013). Synthesis of base Pb-Ti thin films deposited by AA-CVD method, crystalographic and microstructural characterization. Superficies Y Vacío, 26(4), 143-147. Retrieved from https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/156

Abstract

Thin films of PbTiO3 were deposited at a temperature of 400°C onto Pt/Ti/SiO2/Si <100> substrates by the aerosol assisted CVD method using organometallic precursors. With the purpose of stabilizing and homogenizing the Perovskite phase, the films were annealed at 550°C, in a Pb-rich atmosphere, for 12 h. Thermogravimetric analysis of the precursors were performed to determine the theoretical temperature of deposition. The crystallinity of the phase before and after annealing was characterized by grazing incidence x-ray diffraction. Additionally, microstructural analysis using scanning (SEM) and transmission (TEM) electron microscopy was also performed.
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