Universal system of gases and vapors composition measurement at atmospheric pressure based on quadrupole mass spectrometer

Yuriy Kudriavtsev; Miguel Angel Avendaño Ibarra; José Miguel Zárate Reyes; José Juan Jhonatan Díaz López; Jose Pablo Rene Asomoza y Palacio

doi:10.47566/

Authors

Yuriy Kudriavtsev Departamento de Ingeniería Eléctrica - SEES, CINVESTAV, Instituto Politécnico Nacional https://orcid.org/0000-0002-4122-8429
Miguel Avendaño Departamento de Ingeniería Eléctrica - SEES, CINVESTAV, Instituto Politécnico Nacional
José Miguel Zárate Reyes Departamento de Ingeniería Eléctrica - SEES, CINVESTAV, Instituto Politécnico Nacional https://orcid.org/0009-0005-0476-845X
Jose Juan Diaz Departamento de Ingeniería Eléctrica - SEES, CINVESTAV, Instituto Politécnico Nacional https://orcid.org/0000-0003-3662-6745
Rene Asomoza Departamento de Ingeniería Eléctrica - SEES, CINVESTAV, Instituto Politécnico Nacional https://orcid.org/0000-0002-0122-3949

DOI:

https://doi.org/10.47566/

Keywords:

quadrupole mass spectrometer, residual atmosphere, gases and vapor, quantitative analysis

Abstract

This paper describes a system that measures gases at atmospheric pressure using a residual gas analyzer with a quadrupole mass spectrometer. A specially designed gas introduction system made it possible to measure gas mixtures at pressures slightly above and below atmospheric pressure. Additionally, the system can measure gases released when heating liquid and solid samples. Quantitative analyses of gas mixtures can be carried out with good accuracy, with detection limits down to the ppm level.

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