Design of a MEMS-type mass sensor device based on polisilicon microcantilevers
Vol. 27 No. 2 (2014), Research Papers
Vol. 27 No. 2 (2014)

Design of a MEMS-type mass sensor device based on polisilicon microcantilevers

Research Papers
Published 2014-06-15
R. Sánchez Fraga
Instituto Politécnico Nacional, Centro de Investigación en Computación
V. H. Ponce Ponce
Instituto Politécnico Nacional, Centro de Investigación en Computación
M. A. Ramírez Salinas
Instituto Politécnico Nacional, Centro de Investigación en Computación
H. Estrada Vázquez
Centro Nacional de Metrología
J. Munguía Cervantes
Centro de Nanociencias y Micro y Nanotecnologías
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Keywords

MEMS
Sensor
Microelectronics
Cantilever
Electrostatic actuator. MEMS
Sensores
Microelectrónicos
Cantilever
Actuador electroestático.

How to Cite

Sánchez Fraga, R., Ponce Ponce, V. H., Ramírez Salinas, M. A., Estrada Vázquez, H., & Munguía Cervantes, J. (2014). Design of a MEMS-type mass sensor device based on polisilicon microcantilevers. Superficies Y Vacío, 27(2), 61-65. Retrieved from https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/137
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Abstract

This work presents three MEMS mass sensor devices based in oscillating polysilicon cantilevers whose oscillation frequency shifts, due to corresponding changes of an added mass in the reaction container/area, can be better measured. An electrostatic actuator is used which consists of interdigitated electrodes configured to maximize the cantilever’s oscillation amplitude. In consequence, integration design issues between the microelectromechanical device and the signal conditioning and acquisition circuitry are addressed. These designs are to be fabricated in the SUMMiT-V process and they can be suitable for biological or chemical applications. The feasibility of the proposed designs is supported by a mathematical model and FEA calculations performed in COMSOL and ANSYS and mass resolutions of de 3.43 pg/Hz, 6.71 pg/Hz y 17.31 pg/Hz were obtained.

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