Ibarra Villegas FJ, Ortega Cisneros S, Sandoval Ibarra F, Raygoza Panduro JJ, Rivera Domínguez J. Design of capacitive MEMS transverse-comb accelerometers with test hardware. Superficies y Vacio [Internet]. 2013Mar.15 [cited 2024May3];26(1):4-12. Available from: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/173