Sánchez Fraga R, Ponce Ponce VH, Ramírez Salinas MA, Estrada Vázquez H, Munguía Cervantes J. Design of a MEMS-type mass sensor device based on polisilicon microcantilevers. Superficies y Vacio [Internet]. 2014Jun.15 [cited 2024May2];27(2):61-5. Available from: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/137