Effects of hydrogen dilution and B-doping on the density of Si–C bonds and properties of a-SixC1-x:H films. Superficies y Vacio [Internet]. 2016 Apr. 19 [cited 2025 Apr. 4];29(2):38-42. Available from: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/51