Linares Aranda, Mónico, W. Calleja Arriaga, A. Torres Jacome, and C.R. Báez Álvarez. “A Modular and Generic Monolithic Integrated MEMS Fabrication Process”. Superficies y Vacío 30, no. 3 (November 26, 2017): 30-39. Accessed December 4, 2021. https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2017_syv30_1-030030.