Abarca-Jiménez, Griselda Stephany, Gabriel Romero-Paredes Rubio, Mario Alfredo Reyes-Barranca, Miguel Ángel Alemán-Arce, Jacobo Esteban Munguía-Cervantes, and Salvador Mendoza-Acevedo. “Surface Micromachining of a Micro Electromechanical Inertial Transducer Based on Commercially Available Floating Gate Transistor Technology”. Superficies y Vacío 31, no. 3 (September 15, 2018): 48-51. Accessed November 23, 2024. https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-030048.