“Surface Micromachining of a Micro Electromechanical Inertial Transducer Based on Commercially Available Floating Gate Transistor Technology”. Superficies y Vacío 31, no. 3 (September 15, 2018): 48–51. Accessed April 28, 2025. https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-030048.