“Thermoelectrical Characterization and Comparative Analysis of Three Finite Element Models of a MEMS Thermal Sensor”. Superficies y Vacío 31, no. 2 (June 14, 2018): 33–38. Accessed April 16, 2025. https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-020033.