“A Modular and Generic Monolithic Integrated MEMS Fabrication Process”. Superficies y Vacío 30, no. 3 (November 26, 2017): 30–39. Accessed April 17, 2025. https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2017_syv30_1-030030.