Abarca-Jiménez, G. S., G. Romero-Paredes Rubio, M. A. Reyes-Barranca, M. Ángel Alemán-Arce, J. E. Munguía-Cervantes, and S. Mendoza-Acevedo. “Surface Micromachining of a Micro Electromechanical Inertial Transducer Based on Commercially Available Floating Gate Transistor Technology”. Superficies Y Vacío, vol. 31, no. 3, Sept. 2018, pp. 48-51, doi:10.47566/2018_syv31_1-030048.