Linares Aranda, M., W. Calleja Arriaga, A. Torres Jacome, and C. Báez Álvarez. “A Modular and Generic Monolithic Integrated MEMS Fabrication Process”. Superficies Y Vacío, vol. 30, no. 3, Nov. 2017, pp. 30-39, doi:10.47566/2017_syv30_1-030030.