Ibarra Villegas, F. J., S. Ortega Cisneros, F. Sandoval Ibarra, J. J. Raygoza Panduro, and J. Rivera Domínguez. “Design of Capacitive MEMS Transverse-Comb Accelerometers With Test Hardware”. Superficies Y Vacío, vol. 26, no. 1, Mar. 2013, pp. 4-12, https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/173.