[1]
G. S. Abarca-Jiménez, G. Romero-Paredes Rubio, M. A. Reyes-Barranca, M. Ángel Alemán-Arce, J. E. Munguía-Cervantes, and S. Mendoza-Acevedo, “Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology”, Superficies y Vacio, vol. 31, no. 3, pp. 48-51, Sep. 2018.