Sánchez Fraga, R., Ponce Ponce, V. H., Ramírez Salinas, M. A., Estrada Vázquez, H. and Munguía Cervantes, J. (2014) “Design of a MEMS-type mass sensor device based on polisilicon microcantilevers”, Superficies y Vacío, 27(2), pp. 61-65. Available at: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/137 (Accessed: 23November2024).