Linares Aranda, Mónico, W. Calleja Arriaga, A. Torres Jacome, and C.R. Báez Álvarez. 2017. “A Modular and Generic Monolithic Integrated MEMS Fabrication Process”. Superficies Y Vacío 30 (3):30-39. https://doi.org/10.47566/2017_syv30_1-030030.