Sánchez Fraga, R., V. H. Ponce Ponce, M. A. Ramírez Salinas, H. Estrada Vázquez, and J. Munguía Cervantes. 2014. “Design of a MEMS-Type Mass Sensor Device Based on Polisilicon Microcantilevers”. Superficies Y Vacío 27 (2):61-65. https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/137.