ABARCA-JIMÉNEZ, G. S.; ROMERO-PAREDES RUBIO, G.; REYES-BARRANCA, M. A.; ALEMÁN-ARCE, M. Ángel; MUNGUÍA-CERVANTES, J. E.; MENDOZA-ACEVEDO, S. Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology. Superficies y Vacío, [S. l.], v. 31, n. 3, p. 48-51, 2018. DOI: 10.47566/2018_syv31_1-030048. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-030048. Acesso em: 18 apr. 2024.