LINARES ARANDA, M.; CALLEJA ARRIAGA, W.; TORRES JACOME, A.; BÁEZ ÁLVAREZ, C. A modular and generic monolithic integrated MEMS fabrication process. Superficies y Vacío, [S. l.], v. 30, n. 3, p. 30-39, 2017. DOI: 10.47566/2017_syv30_1-030030. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2017_syv30_1-030030. Acesso em: 4 dec. 2021.