SÁNCHEZ FRAGA, R.; PONCE PONCE, V. H.; RAMÍREZ SALINAS, M. A.; ESTRADA VÁZQUEZ, H.; MUNGUÍA CERVANTES, J. Design of a MEMS-type mass sensor device based on polisilicon microcantilevers. Superficies y Vacío, [S. l.], v. 27, n. 2, p. 61-65, 2014. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/137. Acesso em: 2 may. 2024.