IBARRA VILLEGAS, F. J.; ORTEGA CISNEROS, S.; MORENO VILLALOBOS, P.; SANDOVAL IBARRA, F.; DEL VALLE PADILLA, J. L.; RAYGOZA PANDURO, J. J. Analysis of MEMS structures to identify their frequency response oriented to acoustic applications. Superficies y Vacío, [S. l.], v. 28, n. 1, p. 12-17, 2015. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/122. Acesso em: 28 apr. 2024.