MUNGUIA CEVANTES, J. E.; MÉNDEZ MÉNDEZ, J. V.; MENDOZA LEÓN, H. F.; ALEMÁN ARCE, M. Ángel; MENDOZA ACEVEDO, S.; ESTRADA VÁZQUEZ, H. Si3N4 Young’s modulus measurement from microcantilever beams using a calibrated stylus profiler. Superficies y Vacío, [S. l.], v. 30, n. 1, p. 10-13, 2017. DOI: 10.47566/2017_syv30_1-010010. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2017_syv30_1-010010. Acesso em: 2 may. 2024.