Analysis of MEMS structures to identify their frequency response oriented to acoustic applications. Superficies y Vacío, [S. l.], v. 28, n. 1, p. 12–17, 2015. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/122. Acesso em: 24 apr. 2025.