Si3N4 Young’s modulus measurement from microcantilever beams using a calibrated stylus profiler. Superficies y Vacío, [S. l.], v. 30, n. 1, p. 10–13, 2017. DOI: 10.47566/2017_syv30_1-010010. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2017_syv30_1-010010. Acesso em: 4 apr. 2025.