Design of capacitive MEMS transverse-comb accelerometers with test hardware. Superficies y Vacío, [S. l.], v. 26, n. 1, p. 4–12, 2013. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/173. Acesso em: 15 may. 2025.