Design of a MEMS-type mass sensor device based on polisilicon microcantilevers. Superficies y Vacío, [S. l.], v. 27, n. 2, p. 61–65, 2014. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/137. Acesso em: 26 apr. 2025.