Ibarra Villegas, F. J., Ortega Cisneros, S., Moreno Villalobos, P., Sandoval Ibarra, F., del Valle Padilla, J. L., & Raygoza Panduro, J. J. (2015). Analysis of MEMS structures to identify their frequency response oriented to acoustic applications. Superficies Y Vacío, 28(1), 12-17. Retrieved from https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/122