Abarca-Jiménez, G. S.; Romero-Paredes Rubio, G.; Reyes-Barranca, M. A.; Alemán-Arce, M. Ángel; Munguía-Cervantes, J. E.; Mendoza-Acevedo, S. Surface Micromachining of a Micro Electromechanical Inertial Transducer Based on Commercially Available Floating Gate Transistor Technology. Superficies y Vacio 2018, 31, 48-51.