[1]
Linares Aranda, M., Calleja Arriaga, W., Torres Jacome, A. and Báez Álvarez, C. 2017. A modular and generic monolithic integrated MEMS fabrication process. Superficies y Vacío. 30, 3 (Nov. 2017), 30-39. DOI:https://doi.org/10.47566/2017_syv30_1-030030.