Ibarra Villegas, F.J., Ortega Cisneros, S., Sandoval Ibarra, F., Raygoza Panduro, J.J. and Rivera Domínguez, J. 2013. Design of capacitive MEMS transverse-comb accelerometers with test hardware. Superficies y Vacío. 26, 1 (Mar. 2013), 4-12.