Gómez Franco M, Ramírez Treviño A, Figueras E, Sauceda Carvajal A. Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor. Superficies y Vacio [Internet]. 2018Jun.14 [cited 2024Apr.18];31(2):33-8. Available from: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-020033