GÓMEZ FRANCO, M.; RAMÍREZ TREVIÑO, A.; FIGUERAS, E.; SAUCEDA CARVAJAL, A. Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor. Superficies y Vacío, [S. l.], v. 31, n. 2, p. 33-38, 2018. DOI: 10.47566/2018_syv31_1-020033. Disponível em: https://superficiesyvacio.smctsm.org.mx/index.php/SyV/article/view/2018_syv31_1-020033. Acesso em: 16 apr. 2024.